SIMOX和单键埋藏氧化物的响应:捕获和脱除特性

1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471) Pub Date : 1999-09-13 DOI:10.1109/RADECS.1999.858603

P. Paillet, V. Ferlet-Cavrois, J. Schwank, D. Fleetwood

{"title":"SIMOX和单键埋藏氧化物的响应:捕获和脱除特性","authors":"P. Paillet, V. Ferlet-Cavrois, J. Schwank, D. Fleetwood","doi":"10.1109/RADECS.1999.858603","DOIUrl":null,"url":null,"abstract":"X-ray induced charge trapping and detrapping properties are investigated in SIMOX and Unibond(R) buried oxides. A very deep trapping of both holes and electrons is evidenced in these materials. The importance of electron compensation, both during irradiation and anneal, is shown to determine the anneal properties.","PeriodicalId":135784,"journal":{"name":"1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Response of SIMOX and Unibond buried oxides: trapping and detrapping properties\",\"authors\":\"P. Paillet, V. Ferlet-Cavrois, J. Schwank, D. Fleetwood\",\"doi\":\"10.1109/RADECS.1999.858603\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"X-ray induced charge trapping and detrapping properties are investigated in SIMOX and Unibond(R) buried oxides. A very deep trapping of both holes and electrons is evidenced in these materials. The importance of electron compensation, both during irradiation and anneal, is shown to determine the anneal properties.\",\"PeriodicalId\":135784,\"journal\":{\"name\":\"1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-09-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RADECS.1999.858603\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RADECS.1999.858603","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

研究了SIMOX和单键(R)埋藏氧化物的x射线诱导电荷捕获和脱捕特性。在这些材料中证明了空穴和电子的深度捕获。在辐照和退火过程中，电子补偿的重要性决定了退火性能。

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Response of SIMOX and Unibond buried oxides: trapping and detrapping properties

X-ray induced charge trapping and detrapping properties are investigated in SIMOX and Unibond(R) buried oxides. A very deep trapping of both holes and electrons is evidenced in these materials. The importance of electron compensation, both during irradiation and anneal, is shown to determine the anneal properties.

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来源期刊

1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)

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