Simulation and interferometer results of MEMS deformable mirrors

Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.