SAW滤波器的激光探针研究

R. Baer, R. Jungerman
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引用次数: 0

摘要

为了研究声表面波滤波器的声场,设计了一种光纤同差探头。探头测量法向表面位移的振幅和相位,并对表面反射率变化进行校正。用于将激光束聚焦在SAW基板上的光学器件也用于视频成像系统。激光束在图像中可见,简化了探针的对准。研究了许多实用的滤波器配置,包括双向apodized IDT,多条带耦合器和单向换能器。在双向换能器中观察到波前畸变(有时称为apodization损耗)。研究了多带耦合器双道的波束传播特性。单向换能器的方向性是通过扫描换能器的轴来直接测量的。该探针还被用于识别定向错误的基板(导致光束走偏)和研究过度衰减。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser Probe Investigation of SAW Filters
A fi beroptic homodyne probe has been constructed to study the acoustic fields of SAW filters. The probe measures the amplitude and phase of the normal surface displacement, corrected for surface reflectivity variations. The optics used to focus the laser beam on the SAW substrate are also used by a video imaging system. The laser beam is visible in the image, simplifying alignment of the probe. A number of practical filter configurations were investigated, including bidirectional apodized IDT’ s, mu1 t i -strip couplers, and unidi rect ional transducers. Wavefront distortion (sometimes referred to as apodization loss) was observed in bidirectional transducers. The beam spreading properties of both tracks of a multi-strip coupler were studied. The directionality of a unidirectional transducer was directly measured by making scans through the axis of the transducer. The probe has also been used to identify misoriented substrates (which cause beam walkoff) and to study excess attenuation.
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