用硅微加工技术改进共面波导的性能

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Pub Date : 2001-10-22 DOI:10.1109/ICSICT.2001.982006

Shi Yanling, Lai Zongsheng, Xin Peisheng, Zhu Ziqiang

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引用次数: 0

摘要

本文利用CMOS技术和后处理微机械技术，设计和制作了悬架结构的微机械微波传输线。采用混合蚀刻工艺制备了特征阻抗为120 /spl ω /的样品。使用自动网络分析仪在1至40GHz的宽频率范围内对样品进行测量。架空输电线路的结构在传输衰减方面有明显改善。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The performance improvement of coplanar waveguides by silicon micromachined technology

This article reports the design and fabrication of micromachined microwave transmission lines with suspended structure in terms of the CMOS technology and the post-processing micromachined technology. Samples with 120 /spl Omega/ of characteristic impedance were fabricated through hybrid etching processes. Measurements were performed on the samples using the automatic network analyzer in a wide range of frequency from 1 to 40GHz. The structures with suspended transmission lines showed significant improvement in transmission attenuation.

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2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)

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