Wafer-Level ANA Calibrations at NIST

The National Institute of Standards and Technology has begun a program supporting on-wafer scattering parameter measurements. In contrast to many previous NIST endeavors, this program seeks to transfer methodology into industrial measurement laboratories. The subject of this paper is the development of calibration techniques and algorithms, rather than physical standards, for the measurement of on-wafer scattering parameters. In particular, we discuss a TRL-based method which uses transmission lines as standards but includes redundant measurements to improve calibration accuracy and bandwidth.