基于表面化学分析的金硅模结合的几点思考

C. E. Hoge, Simon Thomas
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引用次数: 15

摘要

研究了金硅共晶预铸体的模具粘合可靠性,发现其与合金熔体对集成电路和衬底的润湿性差有关。利用扫描俄歇微探针(SAM)分析了表面和界面结构,并概述了键合和不键合的条件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Some Considerations of the Gold-Silicon Die Bond Based on Surface Chemical Analysis
Die bond reliability using gold-silicon eutectic preforms was investigated and related to poor wetting of the integrated circuit and substrate by the alloy melt. Using a Scanning Auger Microprobe (SAM), surface and interfacial structures were analyzed and the conditions for bonding or non-bonding outlined.
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