Analysis of Artificial Neural Network Based Algorithms For Real Time Dispatching

Queue time restricted zones present some unique challenges for dispatching and scheduling systems in a semiconductor manufacturing facility. In this study we present a real time algorithm for wafer dispatching in queue time zones based on cycle time predictions. Proposed prediction methodologies are based on backpropagation trained artificial neural network and radial basis function based neural network. Results obtained from the artificial neural network models are compared to each other and with a multivariate linear regression model for cycle time prediction.