Ba0.7 Sr0.3 TiO3薄膜的介电性能随沉积层的不同而不同

RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics Pub Date : 2013-09-01 DOI:10.1109/RSM.2013.6706520

T. Y. Chin, Z. Sauli, V. Retnasamy, N. Ramli

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引用次数: 0

摘要

钛酸锶钡(BaxSr1-xTiO3)薄膜是几十年前在世界范围内广泛应用的铁电材料。人们对这种BST薄膜进行了大量的研究。本实验主要研究了不同沉积层的Ba0.7Sr0.3TiO3薄膜的介电性能。随着Ba0.7Sr0.3TiO3沉积层的增加，薄膜的介电性能提高。

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Ba0.7 Sr0.3 TiO3 thin film dielectric properties with different deposition layer

Barium strontium titanate(Ba_xSr_1-xTiO₃), BST thin film was a ferroelectric material used commercially in worldwide since decades ago. Many researches were done on this BST thin film. In this work, the experiment is focus on the dielectric properties of Ba_0.7Sr_0.3TiO₃ thin film with different deposition layer. As the deposition layer of Ba_0.7Sr_0.3TiO₃ increase, the dielectric properties of the thin film increase.

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RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics

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