现代lsi预生产的自主信息系统

Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Pub Date : 2000-09-26 DOI:10.1109/ISSM.2000.993686

H. Ozaki, K. Yatnana, Y. Matsuo, T. Murakami, T. Yamamo, K. Morimoto, A. Shigetomi

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引用次数: 0

摘要

为了实现高效的预生产线，我们开发了“现代lsi自主信息系统”(AIS)。本系统通过个人电脑与产量管理系统(YMS)和生产管理系统(Fab Host)相结合。它清晰地展示了生产中瓶颈设备的损耗时间的可视化信息，以及每个批次和每个工艺的背景数据的粒子图。通过使用这个信息系统，所有相关人员(直线经理、工程师和技术人员)都可以像人体的自主神经系统一样独立、适当、快速地解决问题。“AIS”在我们的研发中试线上一直在发展，作为减少损耗的工具。

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Autonomic information system for pre-production of modern LSIs

To realize an efficient pre-production line, we developed "Autonomic Information System for modern LSIs " (AIS). This system is combined with yield management system (YMS) and manufacturing management system (Fab Host) by using personal computers. It distributes visual information about loss-time of bottleneck equipment on production clearly and a particle map with background data for each lot and each process. By using this information system, all the concerned persons (line manager, engineers and technicians) can dissolve problems independently, appropriately and quickly like the autonomic nervous system works in the human body. "AIS" has been developing in our R&D pilot line as a loss-time reduction tool.

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Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)

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