全悬架冗余环的可靠性研究

Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004. Pub Date : 2004-09-08 DOI:10.1109/SMIC.2004.1398193

F. Flourens, D. Peyrou, K. Yacine, S. Mellé, K. Grenier, D. Dubuc, A. Boukabache, P. Pons, R. Plana

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摘要

本文报道了一种用于毫米波应用的悬式冗余环的可靠性研究。当提出一种原始方法来研究电容式MEMS中的充电效应时，力学表征表明没有重大故障。

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Reliability investigation on a fully suspended redundancy ring

This paper reports on the reliability investigation on a suspended redundancy ring for millimeter wave applications. Mechanical characterization has shown no major failure when an original method is presented to investigate the charging effect in a capacitive MEMS.

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Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004.

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