D. Popescu, B. Mihalea, P. Lerch, P. Renaud, D. Dascalu
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Design and modelling have been made for a new type of integrated flow sensor for implementation in a CMOS compatible technology. The sensor is designed for both gas and fluid flow sensing in applications with transient velocity and temperature profiles. This appear also in microfluidics where there is a pulsating flow when drive is made with micropumps. The sensor is analysed for fluid flow and heat transfer. Modelling and optimisation of the sensor give results for the necessary geometrical parameters and materials of the sensor for maximising the sensibility in applications with a known fluid and in a given domain of fluid velocities and temperatures.
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