高功率激光光学用熔融石英相形光学元件

5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003. Pub Date : 2003-11-17 DOI:10.1109/LFNM.2003.1246134

I. Soldatenkov, V. Atuchin, A. Kirpichnikov, E. V. Mikhailov, D. Sheglov

{"title":"高功率激光光学用熔融石英相形光学元件","authors":"I. Soldatenkov, V. Atuchin, A. Kirpichnikov, E. V. Mikhailov, D. Sheglov","doi":"10.1109/LFNM.2003.1246134","DOIUrl":null,"url":null,"abstract":"Diffractive phase optical elements or kinoforms are receiving marked attention in the recent years because of unconventional light wave transformations that can be realized with its using. Kinoform element function is specified by prescribed surface relief profile with the depth typically defined in the parts of micrometer scale. Usage of improved manufacturing techniques, such as photolithography and ion-beam etching, greatly upgrade the microrelief accuracy. This study considers the method of fabrication of multilevel kinoform microlens arrays in silica substrates feasible for processing of high-power laser beams and the observation of its geometry and optical characteristics.","PeriodicalId":368970,"journal":{"name":"5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Kinoform optical elements in fused silica for high-power laser optics\",\"authors\":\"I. Soldatenkov, V. Atuchin, A. Kirpichnikov, E. V. Mikhailov, D. Sheglov\",\"doi\":\"10.1109/LFNM.2003.1246134\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Diffractive phase optical elements or kinoforms are receiving marked attention in the recent years because of unconventional light wave transformations that can be realized with its using. Kinoform element function is specified by prescribed surface relief profile with the depth typically defined in the parts of micrometer scale. Usage of improved manufacturing techniques, such as photolithography and ion-beam etching, greatly upgrade the microrelief accuracy. This study considers the method of fabrication of multilevel kinoform microlens arrays in silica substrates feasible for processing of high-power laser beams and the observation of its geometry and optical characteristics.\",\"PeriodicalId\":368970,\"journal\":{\"name\":\"5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-11-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LFNM.2003.1246134\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LFNM.2003.1246134","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

近年来，衍射相位光学元件因其可以实现非常规的光波变换而备受关注。kino仿元函数由规定的表面起伏轮廓来指定，其深度通常在微米尺度的部件中定义。使用改进的制造技术，如光刻和离子束蚀刻，大大提高了微浮雕精度。本研究认为在二氧化硅衬底上制备多电平动形微透镜阵列的方法是可行的，可以处理高功率激光束，并观察其几何和光学特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Kinoform optical elements in fused silica for high-power laser optics

Diffractive phase optical elements or kinoforms are receiving marked attention in the recent years because of unconventional light wave transformations that can be realized with its using. Kinoform element function is specified by prescribed surface relief profile with the depth typically defined in the parts of micrometer scale. Usage of improved manufacturing techniques, such as photolithography and ion-beam etching, greatly upgrade the microrelief accuracy. This study considers the method of fabrication of multilevel kinoform microlens arrays in silica substrates feasible for processing of high-power laser beams and the observation of its geometry and optical characteristics.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.

自引率

0.00%

发文量