量产x射线步进机的技术与性能

N. Mizusawa, K. Uda, Y. Tanaka, H. Ohta, Y. Watanabe
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引用次数: 0

摘要

近距离x射线光刻技术(PXL)已经完成了器件制造的论证阶段,并开始量产应用。我们在20世纪80年代中期开始开发x射线光刻工具,并于1992年在三菱电机公司(MELCO)的SR工厂安装了我们的原型机,并与MELCO合作对机器进行了评估。在合作研究中,我们确定了x射线步进器的系统概念,并明确了批量生产工具开发的主题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Technology and performance of X-ray stepper for volume production
Proximity X-ray lithography (PXL) has finished the demonstration stage of device fabrication and has started to be applied for volume production. We started the development of X-ray lithography tool in the middle of 1980's, and in 1992 we have installed our prototype machine in the SR facility of Mitsubishi Electric Corporation (MELCO) and we have evaluated the machine in collaboration with MELCO. In the collaboration study, we have confirmed the system concept of X-ray stepper and clarified subjects for volume production tool development.
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