N. Mizusawa, K. Uda, Y. Tanaka, H. Ohta, Y. Watanabe
{"title":"量产x射线步进机的技术与性能","authors":"N. Mizusawa, K. Uda, Y. Tanaka, H. Ohta, Y. Watanabe","doi":"10.1109/IMNC.2000.872646","DOIUrl":null,"url":null,"abstract":"Proximity X-ray lithography (PXL) has finished the demonstration stage of device fabrication and has started to be applied for volume production. We started the development of X-ray lithography tool in the middle of 1980's, and in 1992 we have installed our prototype machine in the SR facility of Mitsubishi Electric Corporation (MELCO) and we have evaluated the machine in collaboration with MELCO. In the collaboration study, we have confirmed the system concept of X-ray stepper and clarified subjects for volume production tool development.","PeriodicalId":270640,"journal":{"name":"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Technology and performance of X-ray stepper for volume production\",\"authors\":\"N. Mizusawa, K. Uda, Y. Tanaka, H. Ohta, Y. Watanabe\",\"doi\":\"10.1109/IMNC.2000.872646\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Proximity X-ray lithography (PXL) has finished the demonstration stage of device fabrication and has started to be applied for volume production. We started the development of X-ray lithography tool in the middle of 1980's, and in 1992 we have installed our prototype machine in the SR facility of Mitsubishi Electric Corporation (MELCO) and we have evaluated the machine in collaboration with MELCO. In the collaboration study, we have confirmed the system concept of X-ray stepper and clarified subjects for volume production tool development.\",\"PeriodicalId\":270640,\"journal\":{\"name\":\"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-07-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.2000.872646\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.2000.872646","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Technology and performance of X-ray stepper for volume production
Proximity X-ray lithography (PXL) has finished the demonstration stage of device fabrication and has started to be applied for volume production. We started the development of X-ray lithography tool in the middle of 1980's, and in 1992 we have installed our prototype machine in the SR facility of Mitsubishi Electric Corporation (MELCO) and we have evaluated the machine in collaboration with MELCO. In the collaboration study, we have confirmed the system concept of X-ray stepper and clarified subjects for volume production tool development.