几何尺寸对电流应力下焊盘处元素消耗的影响

Hao Zhang, F. Sun, Xuemei Li, Yang Liu, Tong Xin
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引用次数: 0

摘要

本文研究了电流应力作用下焊盘几何尺寸对元件消耗的影响。制作相同体积、不同高度(H1=300μm、H2=420μm、H3=520μm)的Cu/Sn-3.0Ag-0.5Cu(SAC305)/Cu微焊点进行电迁移试验。结果表明,回流后焊盘处铜元素的消耗量随着焊点高度的增加而增加。在电热老化试验中,阴极焊盘处铜元素的消耗随应力时间的增加而线性增加,平均消耗率随焊点高度的增加而增加。结果表明,凸起高度越高的焊点电流密度弥散越小,从而导致金属原子迁移过程中的电流密度越高。电流密度是电迁移过程中的主导驱动力。阳极焊盘处铜元素的消耗量随应力时间平方根的增加呈线性增加,其平均消耗量与阴极处的消耗量具有相同的规律。在与试验试验相同的应力条件下进行了数值模拟。结果表明,凸点高度越高,焊点内部电流密度越大,与实验结果一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Geometric size effects on the elements consuming at the solder pad under current stressing
This paper investigated the geometric size effects on elements consuming at the solder pad under current stressing. The micro solder joints Cu/Sn-3.0Ag-0.5Cu(SAC305)/Cu with same volume and different heights (H1=300μm, H2=420μm and H3=520μm) were made for the electromigration test. The results indicated that the consumption of copper element at the solder pad increased with the increase of the height of the solder joints after reflow. In the electro-thermal aging test, the consumption of copper element at the cathode solder pad increased linearly with the increase of stressing time, and the average consumption rate increased with the increase of the height of the solder joints. It is suggested that the solder joints with a higher bump height had a lower dispersion of current density, which resulted in a higher current density in the migration routine of the metal atoms. Current density is the dominant driving force in the process of the electromigration. However, the consumption of copper element at the anode solder pad increased linearly with the increase of the square root of stressing time, and the average consumption rate has the same law with that at the cathode. The numerical simulation was also conducted under the same stressing conditions as the experimental tests. The results revealed that the solder joint with a higher bump height had a lager internal current density, which is consistent with the experimental results.
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