硅光子学在300mm CMOS晶圆厂的产业化

2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) Pub Date : 2016-04-25 DOI:10.1109/VLSI-TSA.2016.7480504

F. Boeuf, Kirk Ouellette

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引用次数: 3

摘要

最近，由于数据中心对高数据速率和低成本收发器的需求增加，主要受云应用的驱动，硅光子学受到了很多关注。在本文中，我们将展示Si-Photonics在CMOS晶圆厂中的产业化，以解决数据中心市场，特别是在1310nm波长下工作的100Gbits/s PSM-4标准。

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Industrialization of Si-Photonics into a 300mm CMOS fab

Recently Silicon Photonics received a lot of interest due to the increased need of high-data rate and low-cost transceivers in datacenters, mainly driven by cloud applications. In this paper we will demonstrate the industrialization of Si-Photonics in a CMOS fab addressing the datacenter market and more particularly the 100Gbits/s PSM-4 standard operating at 1310nm wavelength.

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2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)

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