微机械氮化硅固体浸没透镜

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879660

K. Crozier, D. A. Fletcher, G. Kino, C. Quate

{"title":"微机械氮化硅固体浸没透镜","authors":"K. Crozier, D. A. Fletcher, G. Kino, C. Quate","doi":"10.1109/OMEMS.2000.879660","DOIUrl":null,"url":null,"abstract":"We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Micromachined silicon nitride solid immersion lenses\",\"authors\":\"K. Crozier, D. A. Fletcher, G. Kino, C. Quate\",\"doi\":\"10.1109/OMEMS.2000.879660\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"30 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879660\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879660","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

提出了一种集成原子力显微镜悬臂梁的氮化硅固体浸没透镜的制备方法。我们证明了使用/spl λ /=633 nm照明的SIL可以分辨200nm线/空间透射光栅(400nm周期)。基于折射率(PECVD氮化硅为/spl sim/1.9)和SIL的几何形状，计算出有效数值孔径为/spl sim/1.8。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Micromachined silicon nitride solid immersion lenses

We present a method for fabricating silicon nitride solid immersion lenses (SIL) integrated with atomic force microscope cantilevers. We demonstrate that a 200 nm line/space transmission grating (400 nm period) may be resolved using the SIL with /spl lambda/=633 nm illumination. Based on the refractive index (/spl sim/1.9 for PECVD silicon nitride) and geometry of the SIL, the effective numerical aperture is calculated to be /spl sim/1.8.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

自引率

0.00%

发文量