MEMS-based switched-capacitor banks for impedance matching networks

This paper presents the design of a 16-state RF MEMS switched-capacitor bank that is used in the implementation of an impedance matching network (IMN). The capacitor bank achieves a wide capacitance tuning range and consequently a wide impedance matching coverage. The IMN is based on co-planar waveguide (CPW) transmission line design and can be included as a standalone chip in dynamically reconfigurable automatic match control circuits used in many wireless devices and applications. The measurement results for both the switched-capacitor bank and the IMN are in good agreement with the simulations thus demonstrating a satisfactory performance in terms of tunability.