VLSI photonics: Science and engineering of micro/nano-scale high-density photonic integration

This paper presents an overview of our work on the theory, design, fabrication, and integration of micro/nano-scale optical devices as applicable for all-optical generic and application-specific VLSI photonic integration. The micro/nano-optical devices are designed to perform the functions of collecting, storing, transporting, processing, switching, routing, and distributing optical signals on chips. The integrated optical components include micro/nano-scale optical waveguides, switches, modulators, sensors, directional couplers, multi-mode interference devices, micro-ring resonators, photonic crystal devices, and plasmonic devices made of polymer, silicon and semiconductor materials. The paper discusses scientific and engineering issues of miniaturizing and integrating micro/nano-scale photonic devices of small and ultra-small dimensions to a very large scale integration density as applicable for specific functions. Scientific and engineering issues are examined and examples of progresses are presented.