极低偏置下基于inas的双极晶体管的直流和射频性能

D. Sawdai, C. Monier, A. Cavus, T. Block, R. Sandhu, M. Goorsky, A. Gutierrez-Aitken, J. Woodall, G. Wicks
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引用次数: 3

摘要

我们制造了具有窄带隙基带的变形InAs双极结晶体管(BJTs),以降低工作电压,并且我们报告了我们认为是首次发表的基于InAs双极晶体管的RF结果。采用分子束外延法在InP衬底上生长了InAs BJTs,采用应变缓释梯度InAlAs缓冲层和优化的梯度发射基和集电极基结。大面积器件(75/spl倍/75 /spl mu/m/sup 2/发射极)的直流电流增益/spl beta/为85。采用不同的InAlAs势垒设计的隧道-发射极双极晶体管中,可以观察到更高的/spl beta/超过100,这表明从基极到发射极的空穴注入更低。使用我们的InP HBT生产线的标准正面工艺制造了小面积器件。从发射器尺寸为1.5/spl倍/10 /spl μ /m/sup 2/的器件中测量的微波特性非常有希望,在具有厚基层和集电极层的器件中显示出超过50 GHz的截止频率。在峰值频率处测量到极低的基极-发射极电压0.3 V。这些基于InP衬底的基于inas的双极晶体管具有良好的直流和射频性能,证明了未来窄带隙异质结双极晶体管在低工作电压下具有最先进的速度性能的可行性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
DC and RF performance of InAs-based bipolar transistors at very low bias
We fabricated metamorphic InAs bipolar junction transistors (BJTs) with a narrow bandgap in the base to reduce operating voltages, and we report RF results that we believe to be the first published for InAs-based bipolar transistors. InAs BJTs were grown by molecular beam epitaxy on InP substrates using strain-relief graded InAlAs buffer layers and optimized graded emitter-base and collector-base junctions. Large area devices (75/spl times/75 /spl mu/m/sup 2/ emitter) exhibit DC current gain /spl beta/ of 85. Higher /spl beta/ exceeding 100 was observed from tunneling-emitter bipolar transistors with various InAlAs barrier designs, indicating lower holes injection from the base to the emitter. Small-area devices have been fabricated using the standard front-side process from our InP HBT line. Microwave properties measured from devices with emitter size of 1.5/spl times/10 /spl mu/m/sup 2/ were very promising, showing a cutoff frequency over 50 GHz in devices with thick base and collector layers. An extremely low base-emitter voltage of 0.3 V was measured at peak frequency. These InAs-based bipolar transistors on InP substrates with good DC and RF performance demonstrate the viability of future narrow bandgap heterojunction bipolar transistors with state-of-the-art speed performance at low operating voltage.
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