可变放大频闪干涉仪测量自适应光学微镜的动态

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879632

C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe

{"title":"可变放大频闪干涉仪测量自适应光学微镜的动态","authors":"C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe","doi":"10.1109/OMEMS.2000.879632","DOIUrl":null,"url":null,"abstract":"Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror\",\"authors\":\"C. Rembe, M. Hart, M. Helmbrecht, U. Srinivasan, R. Muller, K. Y. Lau, R. Howe\",\"doi\":\"10.1109/OMEMS.2000.879632\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879632\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879632","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 16

摘要

干涉测量已被证明是测量MEMS中高精度的面外运动的有力工具。在本文中，我们展示了一种频闪干涉测量装置，该装置将相移技术与光学显微镜的高空间分辨率和孔径特征相结合，从而获得精确的数据配准。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror

Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.

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2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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