J-Alloy-Cu系统中大/薄芯片(39mm2/75µm)重Al楔焊过程中的模具断裂

S. Subaramaniym, Guirit Lynn Simporios, Kuek Hsieh Ting, M. A. Rahman, Wong Jia Yi, C. S. Fang
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引用次数: 0

摘要

采用大而薄的铜(Cu)芯片衬垫框架和无铅焊料(CbC)芯片贴合工艺,开发了大封装。在厚铝丝粘接过程中,遇到了模具断裂的问题。失效分析发现,焊丝键合区存在较大的空洞,芯片背面金属化层(BSM)与焊料层之间也存在孔隙。进行了几项研究和分析,以证明所有的影响因素。结果表明,锡线中的锡元素、铜引线框架和锡线中的氧化物倾向于溶解在熔融焊料中,并在芯片BSM和铜锡金属间化合物(IMC)之间形成多孔混合层。当在模具粘合过程中,由于较长的机器空转时间或芯片所经历的高粘合温度而向粘合单元提供较高的热预算时,混合层的孔隙率和芯片背面金属化的损耗可能会被夸大。此外,在焊锡点焊和打焊过程中,来自焊锡丝的氧化锡(SnO)的高存在导致芯片背面和模垫表面的润湿性差。这导致了大量的焊料空洞形成。由于存在较大的空隙和孔隙,导致芯片强度变弱,无法承受粗铝丝粘接过程中的高力,导致断模缺陷。控制模具贴装过程中对材料的热预算和增加焊料体积是消除这一问题的关键。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Understanding Die Breakage During Heavy Al Wedge Bonding for Large/Thin Chip (39mm2/75µm) in J-Alloy-Cu System
To big package was developed with large and thin chip on Copper (Cu) die pad frame and Lead-free solder in chip by chip (CbC) die attach process. Die breakage during thick Aluminum (Al) wire bond process was encountered. Failure analysis observed high magnitude of void under the wire bond area and also porosity in between the chip backside metallization (BSM) and solder layer. Several studies and analysis were conducted to prove all the contributing factors. The investigation shows Sn element from solder wire, oxide from the Cu lead frame and solder wire tend to dissolve through the molten solder and contribute to a porous mixed layer in between the chip BSM and Copper Tin (CuSn) intermetallic compound (IMC). The porosity of the mixed layer and depletion of the chip backside metallization can be exaggerated when higher thermal budget is supplied towards the bonded units during the die bonding process either due to longer machine idling time or high bonding temperature as experienced by the chip. Besides, high presence of Tin Oxide (SnO) from the solder wire during solder dispensing and spanking process is causing poor wettability towards chip backside as well as on die pad surface. This resulted in high magnitude of solder voids formation. The chip strength became weak with the present of big voids and porosity and thus not able to withstand high force during thick Al wire bonding process resulting to broken die defect. Controlling the thermal budget in die attach process towards the material and increasing the solder volume became essential to eliminate the problem.
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