A programmable sensor signal conditioning LSI

A programmable sensor signal conditioning LSI has a programmable interface circuit to input various signals and has a wide signal range from 10 mV to 2 V. The LSI can calibrate errors of various sensors transfer within 0.5% accuracy in a wide signal range. The signal conditioning LSI has three main modules, that is a sigma-delta AD-converter, a high reliability EPROM, and a 16 bit signal conditioning DSP. The sigma-delta AD-converter has a programmable interface and 10 /spl mu/V minimum resolution. Information determining the input signal range and calibration data are stored in a high reliability EPROM which has a redundant cell architecture. These modules have been integrated in a 0.8 /spl mu/m CMOS process and the chip is 4.3 mm/spl times/4.7 mm.