{"title":"高速、高精度电子装配xy工作台","authors":"M. Okamura, T. Ohshige, M. Watanabe","doi":"10.1109/EEMTS.1988.75966","DOIUrl":null,"url":null,"abstract":"A high-speed, high-accuracy, direct-drive XY-stage developed XY to meet the requirements for LSI or print-circuit board assembly is discussed. This stage has a moving-coil-type linear motor using an NdFeB magnet, which is about 1.5 times as strong as SmCo/sub 5/ rare-earth magnets. Computer aided engineering, including finite-element analysis, was applied to realize optimum design. A two-mode control method, consisting of a traveling mode and a positioning mode, has been developed to obtain stability and high speed positioning. Travel is 50 mm*50 mm, and maximum acceleration is 50 m/s/sup 2/, which is five times as fast as conventional XY-stages.<<ETX>>","PeriodicalId":137899,"journal":{"name":"Fourth IEEE/CHMT European International Electronic Manufacturing Technology Symposium","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"High speed and high accuracy XY-stage for electronic assembly\",\"authors\":\"M. Okamura, T. Ohshige, M. Watanabe\",\"doi\":\"10.1109/EEMTS.1988.75966\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A high-speed, high-accuracy, direct-drive XY-stage developed XY to meet the requirements for LSI or print-circuit board assembly is discussed. This stage has a moving-coil-type linear motor using an NdFeB magnet, which is about 1.5 times as strong as SmCo/sub 5/ rare-earth magnets. Computer aided engineering, including finite-element analysis, was applied to realize optimum design. A two-mode control method, consisting of a traveling mode and a positioning mode, has been developed to obtain stability and high speed positioning. Travel is 50 mm*50 mm, and maximum acceleration is 50 m/s/sup 2/, which is five times as fast as conventional XY-stages.<<ETX>>\",\"PeriodicalId\":137899,\"journal\":{\"name\":\"Fourth IEEE/CHMT European International Electronic Manufacturing Technology Symposium\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1988-06-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Fourth IEEE/CHMT European International Electronic Manufacturing Technology Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EEMTS.1988.75966\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fourth IEEE/CHMT European International Electronic Manufacturing Technology Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EEMTS.1988.75966","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High speed and high accuracy XY-stage for electronic assembly
A high-speed, high-accuracy, direct-drive XY-stage developed XY to meet the requirements for LSI or print-circuit board assembly is discussed. This stage has a moving-coil-type linear motor using an NdFeB magnet, which is about 1.5 times as strong as SmCo/sub 5/ rare-earth magnets. Computer aided engineering, including finite-element analysis, was applied to realize optimum design. A two-mode control method, consisting of a traveling mode and a positioning mode, has been developed to obtain stability and high speed positioning. Travel is 50 mm*50 mm, and maximum acceleration is 50 m/s/sup 2/, which is five times as fast as conventional XY-stages.<>
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
