溶胶-凝胶自旋镀膜法制备ZnO纳米结构

R. Sabry, Mohamed M Hassan, Taghrid Saadoun Muhsin
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引用次数: 0

摘要

在这项研究中,我们采用纺丝的方法在玻片上涂覆了由醋酸二水合锌、单乙醇胺(MEA)、2-甲氧基乙醇组成的溶胶-凝胶ZnO薄膜。研究了退火温度对薄膜结构形貌和光学性能的影响。将这些ZnO薄膜在100℃下预热10 min,在350、500和550℃下退火60 min。无定形氧化锌-醋酸盐颗粒形成的as沉积薄膜经热处理后转变为高取向ZnO。采用扫描电子显微镜(SEM)、原子力显微镜(AFM)、x射线衍射仪(XRD)和光透射率等方法研究了薄膜的表面形貌、相结构和光学性能。这两种技术都产生了取向明确的纳米结构ZnO薄膜。退火后的薄膜在可见光范围内是透明的,吸收边缘约为375 nm,透过率为80%,平均直径为40 nm。XRD结果表明,该薄膜由多晶纤锌矿组成,具有优先的c轴取向(002),且在34.40处有一个单一的尖锐峰,与六方ZnO相对应。晶粒尺寸随退火温度的升高而增大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis of ZnO Nanostructure by Sol-Gel Spin Coating Method
In this study, we use spinning methods to coat glass slides with sol-gel ZnO thin films, composed of zinc acetatedihydrate, monoethanolamine (MEA), 2-Methoxethanol. The effect of the annealing temperature on the structural morphology and optical properties of these films was investigated. These ZnO films were preheated at 100 oC for 10 min and annealed at 350, 500 and 550 ˚C for 60 min. As-deposited films, formed by amorphous zinc oxide-acetate submicron particles, are transformed into a highly-oriented ZnO after thermal treatment. The surface morphology, phase structure and optical properties of the thin films were investigated by scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD) and optical transmittance. Both techniques produced nanostructured ZnO thin films with well-defined orientation. The annealed films were transparent in the visible range with an absorption edge at about 375 nm and a transmittance of 80% with an average diameter of 40 nm. XRD results show the film was composed of polycrystalline wurtzite, with a preferential c-axis orientation of (002) and a single sharp XRD peak at 34.40, corresponding to the hexagonal ZnO. The grain size with increasing the annealing temperature.
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