热气泡驱动的微喷嘴扩散泵

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906563

Jr-Hung Tsai, L. Lin

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引用次数: 63

摘要

成功地演示了一种利用热气泡驱动和喷嘴扩散器流量调节原理的无阀微型泵。该泵由一个曲线形电阻加热器、一对喷嘴扩散器流量控制器和一个直径1mm、深度50 /spl mu/m的泵室组成。液体通过电阻加热周期性膨胀和收缩热泡来驱动，净流量由喷嘴-扩散器流量调节器诱导。研究了单泡和双泡驱动模式。在单泡泵送模式下，在250 Hz、10%占空比的驱动脉冲下，平均功耗为1w，测得最大流量为5 /spl mu/l/min。在双泡泵送模式下，在5%占空比、400hz、平均功耗0.5 W的驱动脉冲下，测量到的流量为4.5 /spl mu/l/min。在零体积流量下，测量到的最高泵送压力为377帕斯卡。

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A thermal bubble actuated micro nozzle-diffuser pump

A valve-less micropump using the principles of thermal bubble actuation and nozzle-diffuser flow regulation is successfully demonstrated. The pump consists of a meander-shaped resistive heater, a pair of nozzle-diffuser flow controllers, and a 1 mm in diameter, 50 /spl mu/m in depth pumping chamber. Liquid is actuated by periodically expanding and collapsing thermal bubbles via resistive heating and a net flow is induced by the nozzle-diffuser flow regulator. Both single-bubble and dual-bubble actuation modes have been investigated. In the single-bubble pumping mode, a maximum flow rate of 5 /spl mu/l/min is measured at the driving pulse of 10% duty cycle at 250 Hz under an average power consumption of 1 W. A similar flow rate of 4.5 /spl mu/l/min is measured in the dual-bubble pumping mode, at the driving pulse of 5% duty cycle at 400 Hz with 0.5 W of average power consumption. The highest measured pumping pressure is 377 Pascal at zero volume flow rate.

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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