{"title":"新型电容式传感器在精密定位系统中的应用","authors":"Tao Chen, Liguo Chen, M. Pan, Lining Sun","doi":"10.1109/ICIEA.2011.5975867","DOIUrl":null,"url":null,"abstract":"This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10μm, with resolution of 5nm.","PeriodicalId":304500,"journal":{"name":"2011 6th IEEE Conference on Industrial Electronics and Applications","volume":"36 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Application of a novel capacitive sensor in precise positioning systems\",\"authors\":\"Tao Chen, Liguo Chen, M. Pan, Lining Sun\",\"doi\":\"10.1109/ICIEA.2011.5975867\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10μm, with resolution of 5nm.\",\"PeriodicalId\":304500,\"journal\":{\"name\":\"2011 6th IEEE Conference on Industrial Electronics and Applications\",\"volume\":\"36 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 6th IEEE Conference on Industrial Electronics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIEA.2011.5975867\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 6th IEEE Conference on Industrial Electronics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIEA.2011.5975867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Application of a novel capacitive sensor in precise positioning systems
This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10μm, with resolution of 5nm.
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