医疗器械用石英微毛细管电泳芯片的研制

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI:10.1109/IMNC.1999.797535

T. Kikuchi, T. Ujiie, T. Ichiki, Y. Horiike

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引用次数: 5

摘要

我们提出了“健康保健设备”，这是一种用于芯片上检测人体健康的智能微分析系统。作为第一步，我们利用高密度等离子体蚀刻技术制作了石英微毛细管电泳芯片，并演示了其高效毛细管电泳操作。

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Fabrication of quartz micro-capillary electrophoresis chips for health care devices

We proposed the "health care device", which is an intelligent micro-analytical system for the on-chip inspection of human health. As a first step we have fabricated a quartz micro-capillary electrophoresis chip using high density plasma etching and demonstrated its high-performance capillary electrophoresis operation.

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Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference

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