场极板对algan /GaN hemt的影响研究

M. Kaddeche, A. Telia, A. Soltani
{"title":"场极板对algan /GaN hemt的影响研究","authors":"M. Kaddeche, A. Telia, A. Soltani","doi":"10.1109/ICM.2009.5418607","DOIUrl":null,"url":null,"abstract":"In this paper we carry out study of the Field Plate (FP) effects on AlGaN/GaN HEMTs (high electron mobility transistors) by modeling the electric field in the structure FP-HEMT (with Field Plate). It consist to analyze the maximum of the electric field according to the gate voltage and drain voltage taking into account several technological parameters of the Field Plate such as the passivation layer thickness, the FP length and the distance gate-drain. We have shown that, the main functions of the field plate are to reshape the electric field distribution in the channel and to reduce its peak value on the drain side of the gate edge. The benefit is an increase of the breakdown voltage and a reduced high-field trapping effect.","PeriodicalId":391668,"journal":{"name":"2009 International Conference on Microelectronics - ICM","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Study of field plate effects onAlGaN/GaN HEMTs\",\"authors\":\"M. Kaddeche, A. Telia, A. Soltani\",\"doi\":\"10.1109/ICM.2009.5418607\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we carry out study of the Field Plate (FP) effects on AlGaN/GaN HEMTs (high electron mobility transistors) by modeling the electric field in the structure FP-HEMT (with Field Plate). It consist to analyze the maximum of the electric field according to the gate voltage and drain voltage taking into account several technological parameters of the Field Plate such as the passivation layer thickness, the FP length and the distance gate-drain. We have shown that, the main functions of the field plate are to reshape the electric field distribution in the channel and to reduce its peak value on the drain side of the gate edge. The benefit is an increase of the breakdown voltage and a reduced high-field trapping effect.\",\"PeriodicalId\":391668,\"journal\":{\"name\":\"2009 International Conference on Microelectronics - ICM\",\"volume\":\"31 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 International Conference on Microelectronics - ICM\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICM.2009.5418607\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Conference on Microelectronics - ICM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM.2009.5418607","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 14

摘要

本文通过对高电子迁移率晶体管FP- hemt结构中的电场进行建模,研究了电场板(FP)对AlGaN/GaN hemt(高电子迁移率晶体管)的影响。它包括考虑到场板的钝化层厚度、FP长度和栅极-漏极距离等几个工艺参数,根据栅电压和漏极电压来分析电场的最大值。我们已经表明,电场板的主要作用是重塑通道内的电场分布,并降低栅极边缘漏极侧的电场峰值。其好处是提高了击穿电压,降低了高场捕获效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of field plate effects onAlGaN/GaN HEMTs
In this paper we carry out study of the Field Plate (FP) effects on AlGaN/GaN HEMTs (high electron mobility transistors) by modeling the electric field in the structure FP-HEMT (with Field Plate). It consist to analyze the maximum of the electric field according to the gate voltage and drain voltage taking into account several technological parameters of the Field Plate such as the passivation layer thickness, the FP length and the distance gate-drain. We have shown that, the main functions of the field plate are to reshape the electric field distribution in the channel and to reduce its peak value on the drain side of the gate edge. The benefit is an increase of the breakdown voltage and a reduced high-field trapping effect.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信