无结晶体管的后门效应及详细表征

M. Parihar, Fanyu Liu, C. Navarro, S. Barraud, M. Bawedin, I. Ionica, A. Kranti, S. Cristoloveanu
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引用次数: 7

摘要

研究了栅极间耦合对采用先进FDSOI技术制备的平面积累模式无结mosfet (JL)反通道特性的影响。提出了一种系统的方法来提取和区分体迁移率和累积迁移率的贡献。在超薄重掺杂JL器件中,栅极电压对后通道的性能有很强的控制作用。研究表明,当锋面处于堆积状态时,体积和堆积模式的流动性都增加了。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Back-gate effects and detailed characterization of junctionless transistor
The work addresses effect of inter-gate coupling on back-channel characteristics of planar accumulation-mode junctionless (JL) MOSFETs, fabricated with advanced FDSOI technology. A systematic methodology to extract and discriminate the contributions of bulk and accumulation-mode mobility has been developed. Front-gate voltage strongly controls the properties of back channel in ultra-thin heavily doped JL devices. It has been demonstrated that both volume and accumulation-mode mobilities increase when the front surface is in accumulation.
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