用于表面阻抗测量和水分监测的MOS芯片

1980 International Electron Devices Meeting Pub Date : 1900-01-01 DOI:10.1109/IEDM.1980.189928

S. Garverick, S. Senturia

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引用次数: 4

摘要

表面阻抗测量用于各种应用，如湿度传感(1)，(2)。经常遇到高达1016欧姆/平方的薄片电阻(3)，并且难以获得可靠的测量。本文报道了一种平面MOS器件和相关的测量技术，可用于测量频率范围为1hz - 10khz的交流片电阻，并可对高达1016欧姆/平方的片电阻进行可重复性测量。

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An MOS chip for surface impedance measurement and moisture monitoring

Surface impedance measurements are employed in a variety of applications such as moisture sensing (1), (2). Sheet resistances as high as 1016Ohms/sq are often encountered (3), and reliable measurements are difficult to obtain. This paper reports a planar MOS device and associated measurement technique that can be used to make AC sheet resistance measurements in the frequency range 1 Hz - 10 kHz, and which yields reproducible measurements for sheet resistances as high as 1016Ohms/sq.

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来源期刊

1980 International Electron Devices Meeting

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