Christian Lay, I. Aseguinolaza, V. Chernenko, M. Kohl
{"title":"铁磁形状记忆合金/硅双晶片纳米致动器的原位表征","authors":"Christian Lay, I. Aseguinolaza, V. Chernenko, M. Kohl","doi":"10.1109/NANO.2014.6967989","DOIUrl":null,"url":null,"abstract":"Nano scale actuators consisting of a free-standing bilayer of ferromagnetic shape memory alloy (FSMA) and silicon with critical lateral dimensions of 250 nm are designed, nanofabricated and characterized in-situ in a scanning electron microscope (SEM). Upon Joule heating and cooling, fully reversible nano actuation in out-of-plane direction of up to 4 % of actuator length is observed. In-situ measurements allow the correlation of resistivity and deflection revealing the presence of the shape memory effect superimposing the bimorph thermal expansion.","PeriodicalId":367660,"journal":{"name":"14th IEEE International Conference on Nanotechnology","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"In-situ characterization of ferromagnetic shape memory alloy / silicon bimorph nanoactuators\",\"authors\":\"Christian Lay, I. Aseguinolaza, V. Chernenko, M. Kohl\",\"doi\":\"10.1109/NANO.2014.6967989\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nano scale actuators consisting of a free-standing bilayer of ferromagnetic shape memory alloy (FSMA) and silicon with critical lateral dimensions of 250 nm are designed, nanofabricated and characterized in-situ in a scanning electron microscope (SEM). Upon Joule heating and cooling, fully reversible nano actuation in out-of-plane direction of up to 4 % of actuator length is observed. In-situ measurements allow the correlation of resistivity and deflection revealing the presence of the shape memory effect superimposing the bimorph thermal expansion.\",\"PeriodicalId\":367660,\"journal\":{\"name\":\"14th IEEE International Conference on Nanotechnology\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"14th IEEE International Conference on Nanotechnology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO.2014.6967989\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"14th IEEE International Conference on Nanotechnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2014.6967989","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nano scale actuators consisting of a free-standing bilayer of ferromagnetic shape memory alloy (FSMA) and silicon with critical lateral dimensions of 250 nm are designed, nanofabricated and characterized in-situ in a scanning electron microscope (SEM). Upon Joule heating and cooling, fully reversible nano actuation in out-of-plane direction of up to 4 % of actuator length is observed. In-situ measurements allow the correlation of resistivity and deflection revealing the presence of the shape memory effect superimposing the bimorph thermal expansion.
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