薄膜混合微电路基板上金铝互连的稳定性

D. Bushmire
{"title":"薄膜混合微电路基板上金铝互连的稳定性","authors":"D. Bushmire","doi":"10.1109/IRPS.1976.362722","DOIUrl":null,"url":null,"abstract":"The effects of gold aluminum intermetallic growth on the stability of interconnects to thin film hybrid microcircuits were studied. Three different metallization systems were evaluated using three types of bonding wire. Tantalum-nitride-chromium-gold was bonded using 0.031 mm alurminum 1% Si wire and 0.031 mm aluminum 1% Mg wire. These two wire types were also bonded to substrates metallized with tantalum-nitride titanium-palladium-gold. Also, gold wire (0.025 mm) was bonded to aluminum metallization. These metallization-bond systems were evaluated by subjecting the tests specimens to various known temperatures and time environments followed by loop pull tests to destruction, bond shear tests to destruction, and four-point probe electrical resistance measurements. The environments included: 1. 1000 hrs. of storage at 100°C, 200°C, and 300°C. 2. Temperature cycling from ¿40°C to 200°C for 10, 50, 100, 500, 1000 cycles. The data shows that the electrical resistance shows drastic increases long before mechanical integrity is degraded. It was not uncommon to see kilohms. The results of aging of gold wire bonding to aluminum metallized substrates is described. Stabilized and unstabilized wire were used, and the effects of time and temperature on bond integrity are reported. Both were types degraded mechanically and electrically with little differences between the two.","PeriodicalId":428300,"journal":{"name":"14th International Reliability Physics Symposium","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1976-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Sand76-5286 Gold Alumium Interconnect Stability on Thin Film Hybrid Microcircuit Substrates\",\"authors\":\"D. Bushmire\",\"doi\":\"10.1109/IRPS.1976.362722\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The effects of gold aluminum intermetallic growth on the stability of interconnects to thin film hybrid microcircuits were studied. Three different metallization systems were evaluated using three types of bonding wire. Tantalum-nitride-chromium-gold was bonded using 0.031 mm alurminum 1% Si wire and 0.031 mm aluminum 1% Mg wire. These two wire types were also bonded to substrates metallized with tantalum-nitride titanium-palladium-gold. Also, gold wire (0.025 mm) was bonded to aluminum metallization. These metallization-bond systems were evaluated by subjecting the tests specimens to various known temperatures and time environments followed by loop pull tests to destruction, bond shear tests to destruction, and four-point probe electrical resistance measurements. The environments included: 1. 1000 hrs. of storage at 100°C, 200°C, and 300°C. 2. Temperature cycling from ¿40°C to 200°C for 10, 50, 100, 500, 1000 cycles. The data shows that the electrical resistance shows drastic increases long before mechanical integrity is degraded. It was not uncommon to see kilohms. The results of aging of gold wire bonding to aluminum metallized substrates is described. Stabilized and unstabilized wire were used, and the effects of time and temperature on bond integrity are reported. Both were types degraded mechanically and electrically with little differences between the two.\",\"PeriodicalId\":428300,\"journal\":{\"name\":\"14th International Reliability Physics Symposium\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1976-04-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"14th International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1976.362722\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"14th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1976.362722","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

研究了金铝金属间生长对薄膜混合微电路互连稳定性的影响。使用三种类型的焊线对三种不同的金属化体系进行了评估。采用0.031 mm铝1% Si线和0.031 mm铝1% Mg线进行了氮化钽-铬-金的熔接。这两种导线类型也被连接到用氮化钽-钛-钯金金属化的衬底上。此外,金线(0.025毫米)被粘合到铝金属化。这些金属化键合系统通过将测试样品置于各种已知的温度和时间环境中进行评估,然后进行环拉测试以破坏,键合剪切测试以破坏,以及四点探头电阻测量。环境包括:1;1000小时。在100°C, 200°C和300°C下储存。2. 温度循环从¿40°C至200°C为10,50,100,500,1000循环。数据表明,在机械完整性退化之前,电阻就会急剧增加。看到千赫兹并不罕见。介绍了金丝与铝金属化基板结合的时效结果。采用稳定线和非稳定线,研究了时间和温度对键合完整性的影响。这两种类型都是机械和电气退化,两者之间几乎没有区别。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Sand76-5286 Gold Alumium Interconnect Stability on Thin Film Hybrid Microcircuit Substrates
The effects of gold aluminum intermetallic growth on the stability of interconnects to thin film hybrid microcircuits were studied. Three different metallization systems were evaluated using three types of bonding wire. Tantalum-nitride-chromium-gold was bonded using 0.031 mm alurminum 1% Si wire and 0.031 mm aluminum 1% Mg wire. These two wire types were also bonded to substrates metallized with tantalum-nitride titanium-palladium-gold. Also, gold wire (0.025 mm) was bonded to aluminum metallization. These metallization-bond systems were evaluated by subjecting the tests specimens to various known temperatures and time environments followed by loop pull tests to destruction, bond shear tests to destruction, and four-point probe electrical resistance measurements. The environments included: 1. 1000 hrs. of storage at 100°C, 200°C, and 300°C. 2. Temperature cycling from ¿40°C to 200°C for 10, 50, 100, 500, 1000 cycles. The data shows that the electrical resistance shows drastic increases long before mechanical integrity is degraded. It was not uncommon to see kilohms. The results of aging of gold wire bonding to aluminum metallized substrates is described. Stabilized and unstabilized wire were used, and the effects of time and temperature on bond integrity are reported. Both were types degraded mechanically and electrically with little differences between the two.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信