{"title":"半导体制造中的环境意识","authors":"Y. Ishii","doi":"10.1109/ISSM.1994.729414","DOIUrl":null,"url":null,"abstract":"World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.","PeriodicalId":114928,"journal":{"name":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","volume":"2009 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Environmental Awareness In Semiconductor Manufacturing\",\"authors\":\"Y. Ishii\",\"doi\":\"10.1109/ISSM.1994.729414\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.\",\"PeriodicalId\":114928,\"journal\":{\"name\":\"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM\",\"volume\":\"2009 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-06-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.1994.729414\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.1994.729414","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Environmental Awareness In Semiconductor Manufacturing
World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.