用于集成电路中光互连的CMOS连续波可调谐III-V微盘激光器

8th IEEE International Conference on Group IV Photonics Pub Date : 2011-11-01 DOI:10.1109/GROUP4.2011.6053755

F. Mandorlo, P. Rojo Romeo, L. Ferrier, N. Olivier, R. Orobtchouk, J. Fédéli, X. Letartre

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引用次数: 3

摘要

在200毫米SOI晶圆上制备了完全兼容CMOS的微磁盘激光器。在低压运行条件下，实现了阈值低于毫瓦的连续运行。将微磁盘耦合到由光子晶体和耦合波导本身形成的伪腔中，由于其光路的主动控制，我们还演示了模式跳变和多模发射。

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CMOS CW tunable III–V microdisk LASERs for optical interconnects in integrated circuits

Full CMOS compatible microdisk LASERs have been fabricated on 200 mm SOI wafers. CW operation with a sub-mW threshold is obtained with low voltage operation. Coupling the microdisk to a pseudo cavity, formed by a photonic crystal and the coupled waveguide itself, we also demonstrate mode hopping and multimode emission thanks to an active control of its optical paths.

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8th IEEE International Conference on Group IV Photonics

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