Shuren Hu, A. Stricker, K. McLean, Calvin Ma, S. Roy, Dean Percy, J. Cartier, D. Clark, R. van Roijen, Bart Green, K. Dezfulian, Louis Medina, J. Ferrario, Dave Riggs, K. Giewont
{"title":"全自动在线光学测试系统:先进材料与光子学","authors":"Shuren Hu, A. Stricker, K. McLean, Calvin Ma, S. Roy, Dean Percy, J. Cartier, D. Clark, R. van Roijen, Bart Green, K. Dezfulian, Louis Medina, J. Ferrario, Dave Riggs, K. Giewont","doi":"10.1109/ASMC.2018.8373215","DOIUrl":null,"url":null,"abstract":"The development of a high throughput, accurate, and cost efficient inline optical test system is a key challenge to mass manufacturing of silicon photonics. For our Silicon Photonic technologies, we developed a fully automated wafer level optical test system for both, active and passive optical testing. The measured insertion loss of fiber grating couplers is repeatable within 1.1dB (3σ). A unique forward and reverse alternative test method is designed to extract photodetector responsivity.","PeriodicalId":349004,"journal":{"name":"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Fully automated in-line optical test system: Advanced materials & photonics\",\"authors\":\"Shuren Hu, A. Stricker, K. McLean, Calvin Ma, S. Roy, Dean Percy, J. Cartier, D. Clark, R. van Roijen, Bart Green, K. Dezfulian, Louis Medina, J. Ferrario, Dave Riggs, K. Giewont\",\"doi\":\"10.1109/ASMC.2018.8373215\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The development of a high throughput, accurate, and cost efficient inline optical test system is a key challenge to mass manufacturing of silicon photonics. For our Silicon Photonic technologies, we developed a fully automated wafer level optical test system for both, active and passive optical testing. The measured insertion loss of fiber grating couplers is repeatable within 1.1dB (3σ). A unique forward and reverse alternative test method is designed to extract photodetector responsivity.\",\"PeriodicalId\":349004,\"journal\":{\"name\":\"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.2018.8373215\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2018.8373215","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fully automated in-line optical test system: Advanced materials & photonics
The development of a high throughput, accurate, and cost efficient inline optical test system is a key challenge to mass manufacturing of silicon photonics. For our Silicon Photonic technologies, we developed a fully automated wafer level optical test system for both, active and passive optical testing. The measured insertion loss of fiber grating couplers is repeatable within 1.1dB (3σ). A unique forward and reverse alternative test method is designed to extract photodetector responsivity.
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