天线结构在WLR监测项目中的优化应用[IC测试]

1997 IEEE International Integrated Reliability Workshop Final Report (Cat. No.97TH8319) Pub Date : 1997-10-13 DOI:10.1109/IRWS.1997.660277

J. Fazekas, W. Asam, J. von Hagen

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引用次数: 1

摘要

当在晶圆级可靠性生产监控程序中使用天线结构时，我们必须考虑到所需测试结构的可用空间和测试时间方面的一些限制性条件。本研究的目的是为有效选择测试结构和适当选择评估测试找到论据。

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Optimized application of antenna structures in a WLR monitoring program [IC testing]

When using antenna structures in a wafer-level reliability production monitoring program, we must take into account some restrictive conditions with regard to the available space for the required test structures and the time allowed for testing them. The purpose of this investigations was to find arguments for efficient selection of test structures and an appropriate choice of evaluation tests.

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来源期刊

1997 IEEE International Integrated Reliability Workshop Final Report (Cat. No.97TH8319)

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