{"title":"基于周期性沟槽硅的光子带隙结构","authors":"V. Tolmachev, T. Perova, E. Astrova, R. Moore","doi":"10.1109/ICTON.2003.1264630","DOIUrl":null,"url":null,"abstract":"Using wet anisotropic etching of [110] Si a number of periodically grooved Si structures with lattice constant, A, ranging from 3 to 16 /spl mu/m have been designed and fabricated. A number of structures with different type of \"defects\" have also been designed and fabricated. These structures with high contrast in refractive index (n/sub si//n/sub air/ = 3.42/1) not only possess a wide main band gap for the photons, but also have reasonably wide secondary stop bands at shorter wavelengths. The IR reflectance spectra for such structures simulated using the method of characteristic matrix showed good agreement with the experimental data. Based on these calculations a \"gap map\" was produced for periodically grooved Si acting as a 1D photonic crystal.","PeriodicalId":272700,"journal":{"name":"Proceedings of 2003 5th International Conference on Transparent Optical Networks, 2003.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Photonic band gap structures based on periodically grooved silicon\",\"authors\":\"V. Tolmachev, T. Perova, E. Astrova, R. Moore\",\"doi\":\"10.1109/ICTON.2003.1264630\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Using wet anisotropic etching of [110] Si a number of periodically grooved Si structures with lattice constant, A, ranging from 3 to 16 /spl mu/m have been designed and fabricated. A number of structures with different type of \\\"defects\\\" have also been designed and fabricated. These structures with high contrast in refractive index (n/sub si//n/sub air/ = 3.42/1) not only possess a wide main band gap for the photons, but also have reasonably wide secondary stop bands at shorter wavelengths. The IR reflectance spectra for such structures simulated using the method of characteristic matrix showed good agreement with the experimental data. Based on these calculations a \\\"gap map\\\" was produced for periodically grooved Si acting as a 1D photonic crystal.\",\"PeriodicalId\":272700,\"journal\":{\"name\":\"Proceedings of 2003 5th International Conference on Transparent Optical Networks, 2003.\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-06-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 2003 5th International Conference on Transparent Optical Networks, 2003.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICTON.2003.1264630\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 2003 5th International Conference on Transparent Optical Networks, 2003.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICTON.2003.1264630","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Photonic band gap structures based on periodically grooved silicon
Using wet anisotropic etching of [110] Si a number of periodically grooved Si structures with lattice constant, A, ranging from 3 to 16 /spl mu/m have been designed and fabricated. A number of structures with different type of "defects" have also been designed and fabricated. These structures with high contrast in refractive index (n/sub si//n/sub air/ = 3.42/1) not only possess a wide main band gap for the photons, but also have reasonably wide secondary stop bands at shorter wavelengths. The IR reflectance spectra for such structures simulated using the method of characteristic matrix showed good agreement with the experimental data. Based on these calculations a "gap map" was produced for periodically grooved Si acting as a 1D photonic crystal.