半导体制造中运行到运行性能评估的贝叶斯指标

2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) Pub Date : 2018-07-01 DOI:10.1109/PRIME.2018.8430365

T. Korabi, G. Graton, E. E. Adel, M. Ouladsine, J. Pinaton

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引用次数: 0

摘要

本文运用贝叶斯理论建立了一种运行到运行控制的指标。该指标用于评估成批工业中监管循环的性能。该指标使用四个主要输入，即输出/目标误差、输出的离散度、超出容限率(oot)和工业风险值。在半导体铸造厂的沉积区域上测试了贝叶斯方法的有效性。

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A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing

In this paper, Bayesian theory is used to build an indicator for Run-to-Run control. This indicator is used for assessing the performances of the regulation loops in a batch industry. The indicator is using four main inputs which are the output/target error, the dispersion of the output, the out of tolerance rate (oot) and the value of the industrial risk. The efficiency of the proposed Bayesian method has been tested on the deposition area of a semiconductor foundry.

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2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)

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