块交叉处理:约束管理的一种创新方法

S. DeBoo
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引用次数: 6

摘要

块交叉加工(BXP)是一种创新的系统,它为制造操作提供了一种方法,可以使用站点内或站点间的材料移动来管理工艺线的受限区域。该系统是一个主动的过程,可以提高灵活性并增加容量。BXP系统可以应用于任何运行通用流程的工厂;它将晶圆厂工艺划分为几个“块”,这些“块”在排队时间、综合良率问题、设备和/或配方匹配以及产能问题方面被确定为“技术安全”。块是一组操作步骤,大小从1到大约10个操作步骤不等,具体取决于块内的技术和容量问题。实施BXP的批次在单个生产车间的整个街区进行处理。BXP大大减少了两个新墨西哥州6英寸工厂车间之间的转移量。此外,BXP数据被用作一种诊断工具,通过识别和缩小不同工厂之间在块水平上不匹配的“差距”来提高产量。本文描述了开发和验证BXP的过程。它记录过程中的关键学习,并为可能的改进提出建议。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Block cross processing: an innovative approach to constraint management
Block cross processing (BXP) is an innovative system developed to provide manufacturing operations with a means for managing constrained areas of a process line using intra-site or inter-site material movement. This system is a proactive process that improves flexibility and increases capacity. The BXP system can be applied to any factories running a common process; it segments the fab process into several "blocks" that are identified as "technically safe" with respect to queue times, integrated yield issues, equipment and/or recipe matching, and capacity concerns. Blocks are a group of operation steps that range in size from 1 to about 10 operation steps depending on the technology and capacity issues within the block. Lots exercising BXP are processed through an entire block on a single manufacturing floor. BXP significantly reduced the amount of transferring between the two New Mexico 6" fab floors. In addition BXP data was used as a diagnostic tool for improving yield by identifying and closing unmatched "gaps" between different factories at a block level. This paper depicts the process used to develop and qualify BXP. It records key learning within the process and notes suggestions for possible improvements.
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