晶圆背面涂层:用于小型集成电路封装的导电晶圆贴附胶

Law Wai Ling, E. Erfe, Aldrin Vaquilar, L. Khor, K. C. Thong, Nicole Yong, Ng Peng Nam, T. Winster, Xuan Hong, Jonathan Israel
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引用次数: 2

摘要

电子设备的复杂性正在迅速增加。移动电话、便携式摄像机和MP3播放器就是这些设备的例子,它们不断将更多的功能融入到越来越小的体积中。在某些情况下,封装设计人员已经能够通过减小半导体封装的外形尺寸来适应这些新要求,因此它们仅比它们所保护的硅芯片略大。然而,这种设计方法对模贴胶提出了挑战。在传统的贴片工艺中,浆料被涂在引线框架衬垫上,芯片被放入浆料中。引线框架衬垫必须设计得比芯片大得多,以允许膏体流动,并在模具边缘形成圆角。此外,模具必须有一个最小的厚度,以防止膏体流动到芯片的上表面。克服这些困难的一种方法是使用不形成圆角的无流模具附件。这使得引线框架衬垫的尺寸可以缩小到比芯片本身更小的尺寸,并且还可以使用更薄的模具。作为薄膜供应的模贴粘合剂是一种方法,但存在成本问题和可用粘合剂厚度的一些限制。为了解决这些问题,晶圆背面涂层™(WBC™)被开发用于应用一种非导电的贴片材料。在此之后,描述了高导电性(银填充)WBC浆料的使用,以降低分立器件封装的成本。本文介绍了一种新型的导电晶圆背面涂层(WBCTM)模贴胶的使用,它提供了良好的性能和可靠性,圆角尺寸可以忽略不计,可用于各种模尺寸。这项工作探讨了WBC导电材料的可制造性,特别是在模板印刷性、锯切性和模具附着性方面。讨论了相关的可制造性响应(如模具打开时间,模具剪切强度,模具倾斜,覆盖等)。最后,提供数据以证实功能器件达到MSL L1/260,以及长期可靠性测试。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wafer Backside CoatingTM of electrically conductive die attach adhesives for small IC packaging
The complexity of electronic devices is increasing rapidly. Mobile phones, camcorders and MP3 players are examples of devices that continue to incorporate more functionality into increasingly smaller footprints. Package designers have been able to accommodate these new requirements in some cases by reducing the outline dimensions of the semiconductor package so that they are only slightly larger than the silicon chip they protect. This design methodology, however, poses challenges for the die attach adhesive. In a traditional die attach process, paste is dispensed onto the leadframe pad and the chip placed into the paste. The leadframe pad must be designed significantly larger than the chip, to allow for the flow of the paste and the formation of a fillet around the die edge. In addition, the die must have a minimum thickness to prevent the paste flowing onto the top surface of the chip. One way to overcome these difficulties is to use a no-flow die attach which does not form a fillet. This allows the size of the leadframe pad to be reduced to a dimension smaller than the chip itself and also enables the use of thinner die. Die attach adhesive supplied as a film is one approach to this, but there are issues with cost and some restrictions on the adhesive thickness that is available. To address these issues, Wafer Backside Coating™ (WBC™) was developed to apply a non-conductive die attach material. Following this, the use of a highly conductive (silver-filled) WBC paste was described to reduce costs in the packaging of discrete devices. This paper describes the use of a novel conductive Wafer Backside Coating (WBCTM) die attach adhesive that delivers good performance and reliability, with negligible fillet size, that can be used over a wide range of die sizes. This work explores the manufacturability of the WBC conductive material, especially in terms of stencil printability, sawing and die attach. Relevant manufacturability responses (such as stencil open time, die shear strength, die tilt, coverage, etc.) are discussed. Finally, data is presented to confirm that functional devices achieve MSL L1/260 and as well as long term reliability testing.
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