200mm光刻i线生产区域整体周期时间分析及改进项目

The 17th Annual SEMI/IEEE ASMC 2006 Conference Pub Date : 2006-05-22 DOI:10.1109/ASMC.2006.1638736

T. Zarbock, F. Lehmann, J. Fellendorf

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引用次数: 0

摘要

本文描述了一种分析和改善工作中心绩效的整体方法，重点是改善循环时间。我们将深入了解项目的设置和执行，以及取得的成果和成功因素。此外，还分享了从这个项目中吸取的经验教训

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Holistic Cycle Time Analysis and Improvement Project within a 200mm Lithography I-line Production Area

In this paper, a holistic approach for analyzing and improving a work center's performance focusing on cycle time improvement is described. We give an insight into the setup and execution of the project as well as achieved results and success factors. Also, lessons learned within this project are shared

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The 17th Annual SEMI/IEEE ASMC 2006 Conference

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