薄膜封装中过孔在制造、装配和压力测试过程中的机械完整性

G. Subbarayan, K. Ramakrishna, B. Sammakia, P.C. Chen
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引用次数: 3

摘要

通过分析模型和数值模型对薄膜封装用过孔的可靠性进行了估计。评估了在制造、组装(例如,卡和散热器连接以及芯片封装)和压力测试(例如,T&H、船舶冲击和加速热循环)期间在过孔中产生热诱发应变的几个过程,以确定在过孔中产生潜在高应变的步骤。这项研究包括两个部分。在第一部分中进行了初步分析,在线弹性假设下,对各过程中的过孔应变进行了分析估计。在研究的第二部分,进行了详细的弹塑性有限元分析,以确定在各个过程中的过孔应变。模型是二维的,本质上是轴对称的。除均匀镀孔外,本研究还对非均匀镀孔进行了分析。在这两部分的研究中,通过在ATC单循环(加速热循环)中的应变与镀铜的Coffin-Manson方程相结合,以确定ATC循环到失效的次数。所分析的孔镀厚度在0.5至1.4密耳之间。从研究中得出的结论是,如果该通孔是可制造的,那么它将在加速热循环测试中幸存下来,从而在现场使用。这一结论与ATC对均匀镀孔产品进行的测试结果一致。该研究的另一个结论是,镀层不均匀的过孔不太可能在严格的制造过程中存活下来。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mechanical integrity of vias in a thin-film package during manufacture, assembly, and stress-test
The reliability of vias used in thin film packages was estimated through analytical and numerical models. Several processes that produce thermally induced strains in the vias during manufacture, assembly (e.g., card and heat sink attach, and encapsulation of the chip), and stress-tests (e.g., T&H, ship shock, and accelerated thermal cycling) were evaluated to determine the steps which induced potentially high strains in the vias. The study consisted of two parts. In the first part, a preliminary analysis was made in which analytical estimates of via strains during the various processes were obtained under the assumptions of linear elasticity. In the second part of the study, detailed elastic-plastic finite element analyses were carried out to determine the via strains during the various processes. The models were two-dimensional, axi-symmetric in nature. In addition to uniformly plated vias, the study also included analysis of non-uniformly plated vias. In both parts of the study, via strain during a single cycle of ATC (accelerated thermal cycle) was combined with the Coffin-Manson equation for plated copper to determine the number of ATC cycles to failure. Via plating thicknesses analyzed were in the range of 0.5 to 1.4 mils. It was concluded from the study that if the via was manufacturable, then it would survive the accelerated thermal cycling test and hence the field use. This conclusion was in agreement with the results of an ATC test conducted on products with uniformly plated vias. Another conclusion from the study was that vias with non-uniform plating were unlikely to survive the rigors of the manufacturing processes.<>
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