电致热刺激forMEMS测试

Proceedings. Ninth IEEE European Test Symposium, 2004. ETS 2004. Pub Date : 2004-05-23 DOI:10.1109/ETSYM.2004.1347605

N. Dumas, F. Azaïs, L. Latorre, P. Nouet

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引用次数: 8

摘要

开发用于MEMS生产测试的低成本go/no-go程序是MEMS可制造性的主要问题之一。特别是，低成本测试刺激的产生是一个真正的挑战。在本文中，我们研究了电致热刺激的产生来测试机电结构。研究了静态响应、暂态响应和谐波响应，并证明了它们可以用于几种故障设备的有效检测和分类。

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Electrically-induced thermal stimuli forMEMS testing

The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.

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Proceedings. Ninth IEEE European Test Symposium, 2004. ETS 2004.

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