K. Ozaki, Hidenori Sekiguchi, S. Wakana, Y. Goto, Yasutoshi Umehara, J. Matsumoto
{"title":"四分之一/spl μ m VLSI电路的新型光学探测系统","authors":"K. Ozaki, Hidenori Sekiguchi, S. Wakana, Y. Goto, Yasutoshi Umehara, J. Matsumoto","doi":"10.1109/ATS.1997.643960","DOIUrl":null,"url":null,"abstract":"An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and high speed. We have introduced a novel optical probing system applicable to quarter-/spl mu/m VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-/spl mu/m spatial resolution by utilizing the scanning force microscope technique. This system can measure internal signal waveforms of VLSI circuits much faster than e-beam testers, and can measure the DC voltage level, which is not possible with e-beam testers.","PeriodicalId":330767,"journal":{"name":"Proceedings Sixth Asian Test Symposium (ATS'97)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Novel optical probing system for quarter-/spl mu/m VLSI circuits\",\"authors\":\"K. Ozaki, Hidenori Sekiguchi, S. Wakana, Y. Goto, Yasutoshi Umehara, J. Matsumoto\",\"doi\":\"10.1109/ATS.1997.643960\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and high speed. We have introduced a novel optical probing system applicable to quarter-/spl mu/m VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-/spl mu/m spatial resolution by utilizing the scanning force microscope technique. This system can measure internal signal waveforms of VLSI circuits much faster than e-beam testers, and can measure the DC voltage level, which is not possible with e-beam testers.\",\"PeriodicalId\":330767,\"journal\":{\"name\":\"Proceedings Sixth Asian Test Symposium (ATS'97)\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-11-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings Sixth Asian Test Symposium (ATS'97)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ATS.1997.643960\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Sixth Asian Test Symposium (ATS'97)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ATS.1997.643960","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
电子束测试仪广泛用于大规模集成电路的内部分析。然而，对于高集成度、高速度的大规模集成电路来说，其波形采集速度低是一个明显的缺点。介绍了一种适用于四分之一/spl μ m VLSI电路的新型光学探测系统。该探测系统基于电光采样技术，利用扫描力显微镜技术实现了亚/spl μ m /m的空间分辨率。该系统能够以比电子束测试仪更快的速度测量VLSI电路的内部信号波形，并且能够测量直流电压电平，这是电子束测试仪无法实现的。
Novel optical probing system for quarter-/spl mu/m VLSI circuits
An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and high speed. We have introduced a novel optical probing system applicable to quarter-/spl mu/m VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-/spl mu/m spatial resolution by utilizing the scanning force microscope technique. This system can measure internal signal waveforms of VLSI circuits much faster than e-beam testers, and can measure the DC voltage level, which is not possible with e-beam testers.
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