光学MEM开关的建模与仿真

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879620

T. Kurzweg, S. Levitan, J.A. Martinez, P. Marchand, D. Chiarulli

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引用次数: 4

摘要

本文利用我们的系统级混合技术CAD工具Chatoyant对2/ sp1次/2光MEM开关进行了建模和仿真。仿真包括在“交叉”和“条形”状态下的操作以及系统的机械公差。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Modeling and simulating optical MEM switches

This paper presents the modeling and simulation of a 2/spl times/2 optical MEM switch using our system-level, mixed-technology CAD tool, Chatoyant. Simulations include operation in both the "cross" and "bar" states and the mechanical tolerancing of the system.

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来源期刊

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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