用沉积法改善好镜的外形

W. Sweatt, J. W. Weed, A. Farnsworth, M. Warren, C. C. Neumann, R. Goeke, R. Shagam
{"title":"用沉积法改善好镜的外形","authors":"W. Sweatt, J. W. Weed, A. Farnsworth, M. Warren, C. C. Neumann, R. Goeke, R. Shagam","doi":"10.1364/eul.1996.dfo149","DOIUrl":null,"url":null,"abstract":"Mid-spatial frequency errors of near-perfect mirrors can be reduced by deposition through a computer-generated mask without degrading the superpolish. Experimental results are presented.","PeriodicalId":201185,"journal":{"name":"Extreme Ultraviolet Lithography (TOPS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Improving the Figure of Very Good Mirrors by Deposition\",\"authors\":\"W. Sweatt, J. W. Weed, A. Farnsworth, M. Warren, C. C. Neumann, R. Goeke, R. Shagam\",\"doi\":\"10.1364/eul.1996.dfo149\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Mid-spatial frequency errors of near-perfect mirrors can be reduced by deposition through a computer-generated mask without degrading the superpolish. Experimental results are presented.\",\"PeriodicalId\":201185,\"journal\":{\"name\":\"Extreme Ultraviolet Lithography (TOPS)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Extreme Ultraviolet Lithography (TOPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/eul.1996.dfo149\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Extreme Ultraviolet Lithography (TOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/eul.1996.dfo149","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4

摘要

通过计算机生成的掩膜沉积,可以减少近乎完美的反射镜的中空间频率误差,而不会降低超抛光效果。给出了实验结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improving the Figure of Very Good Mirrors by Deposition
Mid-spatial frequency errors of near-perfect mirrors can be reduced by deposition through a computer-generated mask without degrading the superpolish. Experimental results are presented.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信