基于Pd-Ta2O5-SiO2-Si结构的MISFET集成氢传感器误差估计

2019 IEEE 31st International Conference on Microelectronics (MIEL) Pub Date : 2019-09-01 DOI:10.1109/MIEL.2019.8889631

B. Podlepetsky, A. Kovalenko

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引用次数: 0

摘要

我们在实验研究多个传感器氢响应的基础上，在考虑工作模式的情况下，估计了基于Pd-Ta2O5-SiO2-Si结构的misfet集成氢传感器的各种误差。提出了计算这些误差的广义模型。

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Estimation of Errors of Integrated Hydrogen Sensors based on MISFET with structure Pd-Ta2O5-SiO2-Si

We have estimated various types of errors of integrated hydrogen sensors based on MISFETs with structure Pd-Ta2O5-SiO2-Si on the basis of experimental studies of the multiple sensors' hydrogen responses, taking into account operating modes. The generalized model for the calculation of these errors was proposed.

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2019 IEEE 31st International Conference on Microelectronics (MIEL)

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