{"title":"压电MEMS加速度计的数学模型","authors":"M. Pereyma","doi":"10.1109/MEMSTECH.2008.4558740","DOIUrl":null,"url":null,"abstract":"In this paper mathematical model of the piezoelectric accelerometer based on unimorph cantilever beam 31 direction was considered. Numerical verification of the mathematical model was performed.","PeriodicalId":265845,"journal":{"name":"2008 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Mathematical model of piezoelectric MEMS accelerometer\",\"authors\":\"M. Pereyma\",\"doi\":\"10.1109/MEMSTECH.2008.4558740\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper mathematical model of the piezoelectric accelerometer based on unimorph cantilever beam 31 direction was considered. Numerical verification of the mathematical model was performed.\",\"PeriodicalId\":265845,\"journal\":{\"name\":\"2008 International Conference on Perspective Technologies and Methods in MEMS Design\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 International Conference on Perspective Technologies and Methods in MEMS Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSTECH.2008.4558740\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 International Conference on Perspective Technologies and Methods in MEMS Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSTECH.2008.4558740","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mathematical model of piezoelectric MEMS accelerometer
In this paper mathematical model of the piezoelectric accelerometer based on unimorph cantilever beam 31 direction was considered. Numerical verification of the mathematical model was performed.