MOSAIC 1产品传递采用虚拟流概念

P. Wang, S. Spivey, E. Warda, M. Bowser, B. Cosentino, E. Zabasajja, P. Shah, S. Imam, J. Keller, J. Fulton
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引用次数: 0

摘要

晶圆制造的金融繁荣表明,我们必须整合连续和成熟技术晶圆厂的资产。晶圆厂合并过程中出现了许多复杂的挑战。由于向客户提供透明的结果是主要目标,一个复杂的问题是技术转让。在1996年第四季度,摩托罗拉双极3 (BP3)经历了产品需求的显著增加,特别是MOSAIC 1技术。需求超出了BP3的能力。由于Motorola Bipolar-2 (BP2)采用了类似的工艺,而且产能过剩,因此决定在BP2中验证MOSAIC 1技术。由于这两个制造区域没有相同的设备和工艺,因此在这两个晶圆厂之间转移和匹配工艺和技术是极其困难的。本文描述了从BP3向BP2转移MOSAIC 1技术的系统方法。应用了可以作为未来转移框架的新技术,其中包括虚拟流概念的开发和使用,以及转移的彻底文档。此外,本文还提供了一种独特的解决方案,以解决特定设备产生的问题。结果,比计划提前,是设备的成功鉴定。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MOSAIC 1 product transfer using virtual flow concept
Financial prosperity in wafer fabrication suggests that we must consolidate assets of contiguous and mature technology wafer fabs. Many complex challenges arise in fab consolidations. With transparent results to customers being the main objective, one intricate issue is the transfer of a technology. During the 4th quarter of 1996, Motorola Bipolar-3 (BP3) experienced a significant increase in request for product, particularly MOSAIC 1 technology. The demand exceeded BP3's capacity. Since Motorola Bipolar-2 (BP2) ran similar processes and had excess capacity, it was decided to qualify the MOSAIC 1 technology in BP2. Since these two manufacturing areas do not have identical equipment and processes, it was extremely difficult to transfer and match processes and technology between these two fabs. This paper depicts a systematic approach in transferring MOSAIC 1 technology from BP3 to BP2. Novel techniques were applied that can be the framework for future transfers, which include development and use of the concept of virtual flow, and thorough documentation of the transfer. In addition, this paper provides a unique solution to the problems incurred with a particular device. The outcome, ahead of schedule, was a successful qualification of the device.
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