{"title":"成熟的200mm晶圆厂从标准化到完全自动化的漫长旅程","authors":"H. Heinrich, A. Deutschländer","doi":"10.1109/ASMC.2018.8373214","DOIUrl":null,"url":null,"abstract":"This paper describes our long journey from the first standardization projects to support a fully automated workflow to three complex automation hardware projects and will include the learnings about the change management within a running fab for all departments. In the end you will see a fully automated running 200 mm fab with similar productivity key performance indicators (KPI) as a standard automated 300 mm fab today, except the wafer size. We developed our general \"Automation Principles\" for all Infineon frontend and backend sites and start training courses for management, engineers and operators.","PeriodicalId":349004,"journal":{"name":"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"The long journey from standardisation to full automation of a mature 200 mm fab\",\"authors\":\"H. Heinrich, A. Deutschländer\",\"doi\":\"10.1109/ASMC.2018.8373214\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes our long journey from the first standardization projects to support a fully automated workflow to three complex automation hardware projects and will include the learnings about the change management within a running fab for all departments. In the end you will see a fully automated running 200 mm fab with similar productivity key performance indicators (KPI) as a standard automated 300 mm fab today, except the wafer size. We developed our general \\\"Automation Principles\\\" for all Infineon frontend and backend sites and start training courses for management, engineers and operators.\",\"PeriodicalId\":349004,\"journal\":{\"name\":\"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.2018.8373214\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2018.8373214","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The long journey from standardisation to full automation of a mature 200 mm fab
This paper describes our long journey from the first standardization projects to support a fully automated workflow to three complex automation hardware projects and will include the learnings about the change management within a running fab for all departments. In the end you will see a fully automated running 200 mm fab with similar productivity key performance indicators (KPI) as a standard automated 300 mm fab today, except the wafer size. We developed our general "Automation Principles" for all Infineon frontend and backend sites and start training courses for management, engineers and operators.
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